Direct manufacture of miniature bio-particle electro-manipulator devices using excimer laser mask projection techniques

摘要

Excimer laser mask projection techniques have been developed and used to manufacture directly miniature thin film devices for the electro-manipulation and separation of bio-particles using travelling-wave dielectrophoresis effects. Multi-leveldevices with 10μm-wide electrode structures have been fabricated by using excimer laser ablation techniques in both static and mask scanning modes of operation. A prototype device produced in this manner has been used to idertif~ viable and nonviableoocysts.