首页> 外文期刊>International Journal of Refractory Metals & Hard Materials >Growth and characterization of integrated nano- and microcrystalline dual layer composite diamond coatings on WC-Co substrates
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Growth and characterization of integrated nano- and microcrystalline dual layer composite diamond coatings on WC-Co substrates

机译:WC-Co基体上集成的纳米和微晶双层复合金刚石涂层的生长和表征

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摘要

In this work, integrated composite diamond (ICD) coatings have been achieved with top layer nanocrystallin-ity, low friction coefficient and enhanced integrity. ICD coatings were deposited on chemically treated tungsten carbide (WC-Co) substrates using hot filament chemical vapour deposition technique. Nanocrystalline diamond (NCD) layer was deposited over microcrystalline diamond (MCD) layer with a coating architecture of NCD/transition layer/MCD/WC-Co. Graded transition layer thickness of ~ 1 um was realized by controlling the process parameters such as methane concentration and chamber pressure in order to integrate the MCD and NCD layers. Integrity of the coatings was examined by the cross-sectional studies. Structural and micro-structural characteristics of ICD coatings were compared with those of MCD coatings. The measured average nanohardness of ICD coating was -96 GPa. A low and stable friction coefficient of-0.06 was observed for ICD coatings against silicon nitride (Si_3N_4). ICD coatings were anticipated to exploit the advantages of both NCD and MCD coatings and these coatings can be promising candidates for various mechanical applications.
机译:在这项工作中,已获得具有顶层纳米结晶度,低摩擦系数和增强的完整性的集成复合金刚石(ICD)涂层。使用热丝化学气相沉积技术,将ICD涂层沉积在经过化学处理的碳化钨(WC-Co)基材上。将纳米晶金刚石(NCD)层沉积在具有NCD /过渡层/ MCD / WC-Co涂层结构的微晶金刚石(MCD)层上。通过控制工艺参数(例如甲烷浓度和反应室压力)可实现〜1 um的渐变过渡层厚度,以整合MCD和NCD层。通过横截面研究检查了涂层的完整性。比较了ICD涂层和MCD涂层的结构和微观结构特征。 ICD涂层的测量平均纳米硬度为-96 GPa。对于ICD涂层,对于氮化硅(Si_3N_4)观察到低且稳定的摩擦系数-0.06。预期ICD涂层将利用NCD和MCD涂层的优势,这些涂层对于各种机械应用而言有望成为有前途的候选材料。

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