Ion probe diagnostics of laser ablated plumes for thin carbon films deposition

摘要

The propagation of the carbon plumes in argon atmosphere used for film growth by pulsed laser ablation deposition (PLAD) is studied using ion probe. Spatial and angle resolved analysis of plasma parameters as a function of argon gas pressure is presented. The electron temperature is strongly dependent on the angle with target surface normal as well as the distance from the target surface. The forward directed nature of the PLAD process is strongly influenced by the pressure of the ambient gas. The plasma parameters are used to explain the effect of ambient gas pressure on the characteristics of the deposited film. [References: 25]