Fabrication of series-pattern micro-disk electrode and its application in machining micro-slit of less than 10μm

摘要

A technology for fabricating the micro-disk through the application of micro-EDM (micro electrode discharge machining) is proposed in this paper. Precisely controlling the tracking path of wire tool electrode during sparking, micro-disks with a variety of thickness can be formed on a metal raw pin. The process has been demonstrated by producing some products such as a parasol-shaped scanning probe and series-pattern micro-disk. In addition, the series-pattern micro-disk can also be used as a rotating tool electrode, which is referred to as micro-rotating disk electrode (MRDE), to simultaneously achieve micro-slits with widths as low as 8 um. A micro-mold consisting of parallel and unequal micro-slits, which can be applied to measure the amount of bio-cell, has been successfully accomplished via this approach.