A simple approach of compensating friction error of high-precision tables is proposed in this paper. On the basis of accurate prediction of the magnitude of the friction error and the place where it occurs, a compensator is first constructed which consists of an online friction error prediction model and rectangular compensation curves regarded as compensation pulses. Then by carrying out optimal compensation experiments several times, the parameters describing the rectangular compensation curve at certain positions can be obtained. Finally, the optimal parameters of the rectangular compensation curve at any position can be determined by interpolation and approximation. It has been shown that, the method to compensate friction error proposed in this paper can be applied to effectively compensate the friction error for all circular motions of high-precision tables.
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