Evaluation of micro-replication technology using silicone rubber molds and its applications

摘要

Micro-replication technology (MRT) originated in semiconductor processes and has been widely utilized in other industries such as sensors, micro-fluidics and displays. Recently, however, MRT has been slow in spreading due to its high cost and material limitations. Therefore, a new process in this paper, for MRT using silicone rubber molds is introduced. In this process, a silicone rubber mold transfers a master pattern to the final product with the same shape but different material. In order to verify the possibility of applying silicone rubber molds to MRT, its transferability was evaluated, and then was applied to the fabrication of PDF barrier ribs.