Rapid heat treatment for spin coated ITO films by electron plasma annealing method

摘要

A method of Electron Plasma Annealing (EPA) is developed. The EPA method allows a lower substrate temperature to be used in spin-coating-type ITO film fabrication. Using the EPA method is expected to have beneficial sample surface heating and plasma treatment effects. The ITO films which are treated in an N-2 gas atmosphere by EPA exhibit lower resistivity and higher transmittance than ITO films fabricated with a thermal treatment at 550 degreesC. The ITO films obtained by N-2 EPA treatment also show higher density and purity, although they have finer grain compared to the thermal annealing films. These structural features should be the reason for the good electrical and optical characteristics of ITO films. (C) 2002 Elsevier Science B.V All rights reserved. References: 8