The alloy Ti:W was oxidized in 100percnt; O2at temperatures ranging from 375 to 505thinsp;deg;C. The resulting oxides were analyzed with Auger electron spectroscopy, xhyphen;ray photoelectron spectroscopy, Rutherford backscattering spectroscopy, and ellipsometry. The resulting oxide structure contains both Ti and W and appears to be simply a combination of TiO2and WO3. The indices of refraction of the TiW metal and the oxide were determined to beNs=2.84ndash;3.08jandNf=2.25ndash;0.12j, respectively. Film thicknesses of the oxides formed at various temperatures and times were measured with ellipsometry and the resulting kinetics are presented. The growth kinetics were determined to be parabolic with an activation energy of 33.9 kcal per mole (1.47 eV).
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