Cobalt doped Zinc oxide films Zn{sub}(1-x)Co{sub}xO with the atomic fraction x in the range 0.035-0.115 were prepared by sputtering from composite ZuO/Co{sub}3O{sub}4 targets. X-ray diffraction pattern shows the ZnO phase with (002) preferential orientation. Magnetic measurements show ferromagnetic behavior with Curie temperatures higher than 350 °K.
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