MODELING OF A TWO-AXIS TORSIONAL MICROMIRROR USING AHDL

摘要

This paper presents the development of a reduced-order macro-model for a two-axis electrostatic torsional micromirror using analog hardware description language (AHDL). The proposed macro-model permits extremely fast simulation while providing nearly FEM accuracy. This enables the user to investigate the close-loop controlled global system level performances at acceptable computational cost.