Low threshold continuously tunable vertical-cavity surface-emitting lasers with 19.1 nm wavelength range

摘要

Continuous wavelength tuning of 19.1 nm is reported for vertical-cavity surface-emitting lasers. Stress-matched dielectric mirror stacks are added to the micromachined deformable-membrane top mirror to enhance reflectance, resulting in devices with 6.5 quantum efficiency and threshold current as low as 0.34 mA. The laser operates in single mode near'968 nm with 24 dB mode suppression ratio and tuning voltages are below 18 V. # 1997 American Institute of Physics. S0003-6951(97)03305-6