机译:Improving precursor adsorption characteristics in ATR-FTIR spectroscopy with a ZrO2 nanoparticle coating
Daejeon Univ, Dept Adv Mat Engn, Daejeon 34520, South Korea;
Korea Res Inst Stand & Sci, Ctr Vacuum Technol, Daejeon 34113, South Korea;
Univ Sci & Technol, Dept Adv Device Technol, Daejeon 34113, South Korea;