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首页> 外文期刊>電子情報通信学会技術研究報告. 超音波. Ultrasonics >Measurement of Bridge phenomenon on Electric Contact Using LiNbO{sub}3 Piezoelectric Actuator
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Measurement of Bridge phenomenon on Electric Contact Using LiNbO{sub}3 Piezoelectric Actuator

机译:Measurement of Bridge phenomenon on Electric Contact Using LiNbO{sub}3 Piezoelectric Actuator

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摘要

A LiNbO{sub}3 piezoelectric actuator controls the Au-Au contact gap with sub-micron accuracy. Bridge resistance and length were derived at a contact operation. We examine the influence of small slide vibration over Au-Au electric contact bridge phenomenon. The sub-micron slide vibration was impressed to the fixed. Using the actuator displacement, the sticking force was estimated by the finite element method, The resonance vibration of bimorph actuator was observed just after the bridge break. The motive force of the resonance would be the impulsive force due to the bridge break. Using the impulse model, the resonance vibration of actuator was simulated by the electro mechanical equivalent circuit.

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