Proton exchanged waveguides for surface acoustic waves on LiNbO3

摘要

For the first time waveguides for surface acoustic waves (SAW) have been fabricated by exchanging Li+ions with protons onYhyphen;cut LiNbO3substrates. Different waveguiding structures were investigated. The influence of the proton source dilution, the annealing or the Ti prediffusion on the SAW velocity, and the parameters of the SAW waveguides have been studied.