Elemental distributions of Ni, Mn, and Co nearby the interfaces of sputtered ultrathin NiMn/Co multilayers have been investigated by x-ray anomalous scattering. In the direction normal to the film, the elements Ni, Co, and Mn are observed to vary gradually at the Co/NiMn interface with each element having a different distribution. After the samples were annealed at 300℃ for periods of 3, 10, or 20 h, the elements are observed to vary gradually at the NiMn/Co interface, as well. To obtain information on the in-plane distribution of each element at the interfaces, x-ray diffuse scattering experiments were performed with x-ray energy close to the Ni, Co, and Mn K edges. Different geometrical interfacial correlated roughness is observed with different x-ray energy.
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