(YBa↓(2) Cu↓(3)O↓(7-δ),Au)/SrTiO↓(3)/LaAlO↓(3)thin film conductor/ferroelectric coupled microstripline phase shifters for phased array applications

摘要

We report on the design, fabrication, and testing of novel YBa↓(2)Cu↓(3)O↓(7-δ)/SrTiO↓(3)/LaAlO↓(3) (YBCO/ STO/LAO) and Au/SrTiO↓(3)/LahlO↓(3) (Au/STO/LAO) coupled microstrip line phase shifters (CMPS). These CMPS were tested at frequencies within the Ku and K bands ( 12-20 GHz). at temperatures from 24 to 77 K, and at dc voltages (V↓(dc)) from zero to 350 V. A relative insertion phase shift (△ф) of 390° was measured for an eight-element YBCO/STO/LAO CMPS at V↓(dc)=350 V. 16 GHz. and 40 K. At 77 K, a △φ ～260° was obtained for the CMPS at the same bias and frequency. Both results correspond to an effective coupling length of 0.33 cm. At both temperatures, the phase shifter exhibits a figure of merit of ～ 30°/dB. To our knowledge, these are the best results published so far at these frequencies where miniaturization, insertion loss. and phase delay are key considerations. #1997 American Institute of Physics. S0003-6951 (97103547-X