Diffusion of Al in Pt films over the temperature range of 200deg;ndash;600thinsp;deg;C has been studied in different ambients. A single phase of Pt5Al3is observed in forming gas at 200thinsp;deg;C, which starts to transform into Pt3Al above 400thinsp;deg;C. In the presence of oxygen, however, the formation of Pt5Al3is completely suppressed at 200thinsp;deg;C and greatly reduced at 300thinsp;deg;C. It also slows down the transformation into Pt3Al at higher temperatures. These are in agreement with the predicted effect of oxygen on the diffusion of Al in Pt films.
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