机译:DFT Study on the Gas-Phase Potential Energy Surface Crossing Mechanism of ZnO Formation from Diethylzinc and Triplet Oxygen during Metal-Organic Chemical Vapor Deposition
South China Normal Univ, Sch Chem & Environm, MOE Key Lab Theoret Chem Environm, Guangzhou 510006, Guangdong, Peoples R China;
Sun Yat Sen Univ, Sch Elect & Informat Technol, Guangzhou 510006, Guangdong, Peoples R China;
Diethylzinc; Spin conversion points; Triplet oxygen; ZnO-MOCVD; THERMAL-DECOMPOSITION; OXIDE; ZINC; GROWTH; MOCVD; PYROLYSIS; WATER; DIETHYLTELLURIUM; AUTOXIDATION; PEROXIDES;