This paper describes magnetic properties of Sm-Fe-N films prepared by an aerosol deposition method. The films with thickness of 3-45 μm were Obtained by the deposition within 10 min and the deposition rate was estimated as approximately 2-10 μm/min. The Sm-Fe-N films showed relatively high micro Vickers hardness in the range from 500 to 700. The remanence of the Sm-Fe-N films was approximately 0.4 T, which was lower than that of initial host powders. However, almost of all samples showed higher coercivities around 1.8 T.
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