Broadband characteristics micrometer-sized on-chip bow-tie antennas are examined in terahertz region. We simulate effects of central geometrical feeding structure on frequency independence and upper limit frequency of broadband radiation region. It is found that the micrometer-sized bow-tie antennas can reveal frequency independent characteristic up to several THz and the upper limit frequency of the radiation region depends on the feeding structure and the inner geometrical structure. The vertical feeding structure is found to be sensitive to feeding pad size resulting narrower broadband than the lateral feeding structure when the feeding electrode pad size is in the order of several tens μm.
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