The use of elastic recoil detection for stoichiometry determination of reactively evaporated TiN layers

摘要

Thin TiN layers have been successfully produced by reactive evaporation combined with rapid thermal annealing. Their stoichiometry as a function of depth has been measured by elastic recoil detection combined with timehyphen;ofhyphen;flight. It is shown that this technique is the most appropriate for stoichiometry determination of TiN layers.