Fabrication of copper-nanoparticle embedded in amorphous carbon films and their electrical conductive properties

摘要

Electrical conductive properties of copper-carbon composite coatings were investigated. Films of several hundred nanometers were deposited onto dielectric substrates using acetylene-generated plasma and co-sputtering of copper target. Transmission electron microscope was employed for the analyses of the microstructure of the coatings. Temperature dependence of resistance of the investigated coatings was measured by changing the temperature from 80-400 K in vacuum condition. Electrical conductive properties were discussed in terms of the microstructure of the coatings deposited under the various conditions.