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Rapid thermal processing of zirconia thin films produced by the sol‐gel method

机译:溶胶连字符凝胶法生产氧化锆薄膜的快速热处理

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摘要

The kinetics of the amorphous‐to‐tetragonal transformation has been studied in sol‐gel‐derived thin films of zirconia deposited on alumina substrates. A rapid‐thermal‐annealing system was used which allowed good control of processing parameters such as temperature and heating rates. The effect of these two parameters on the transformation kinetics was studied and the experimental results were analyzed in terms of conventional nucleation and growth models. The use of two‐step thermal processing cycles shows potential for the modification of the microstructural features of crystallized films and for a reduction in processing times.
机译:在沉积在氧化铝衬底上的氧化锆的溶胶中研究了无定形-连字符-连字符-四方相变的动力学。使用快速热热退火系统,可以很好地控制温度和加热速率等加工参数。研究了这两个参数对转化动力学的影响,并结合常规成核和生长模型分析了实验结果。使用两步热处理循环显示出改变结晶薄膜的微观结构特征和减少加工时间的潜力。

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