Singlehyphen;step fabrication of strongly confining quasiphasehyphen;matching waveguides in LiTaO3

摘要

Strongly confining waveguides were fabricated in LiTaO3at high temperature (540ndash;610thinsp;deg;C) by shorthyphen;time (le;6 s) rapid thermal annealing. Singlehyphen;step photolithography is able to accomplish the simultaneous fabrication of a waveguide and a periodically domainhyphen;inverted structure for secondhyphen;order quasiphasehyphen;matching bluehyphen;light generation. A measured normalized conversion efficiency of 7percnt;/Wthinsp;cm2for a physical length of 0.55 mm in a planar quasiphasehyphen;matching waveguide showed that this singlehyphen;step process can lead to high conversion efficiency in channel waveguides. copy;1996 American Institute of Physics.