On-line monitoring of optical precision goniometric structures

摘要

It is shown that, in industrial production, when implementing 100 input monitoring of the metrological characteristics of precision optical angle-measuring structures (dials, rasters, and multibit graduated disks), the use of the differential measurement method is promising. An example of the use of this method in an automated setup for measuring and diagnosing damage to the topology of working samples and photomasks of angle-measuring structures is provided. (c) 2019 Optical Society of America