Mechanisms of carbon deposition-a kinetic approach

摘要

Understanding the mechanisms of carbon deposition in chemical vapor deposition from light hydrocarbons has been a challenge from the very beginning 1. Numerous models have been proposed over the years, e.g. Refs. 2-16. They were derived, in most caes, from the resuts of light and electron microscopic studies of deposited layers 2-8,12,14,15. Scanning tunneling microscopy was used in a recent study 16.