Temperature-uniforming technology for temperature controlled bath and some of its applications

摘要

The temperature controlled baths installed in the latest types of liquid crystal injection systems and burn-in systems are required to ensure excellent inside temperature uniformity. We have made a series of researches to successfully develop temperature controlled baths that meet such requirements, utilizing the computer simulation method for the investigation of heat transfer and fluid dynamics. A forced gas circulation system, that employs a fan or a blower, is often used in such temperature controlled baths. It is required that temperature-uniformed gas is fed uniformly into the work area of the bath. This paper refers to our newly developed technique to make the temperatures uniform in temperature controlled baths, also presenting some examples of applications of this technique.