The high precision and high speed demand for the XY stage has risen along with making to high performance about the semiconductor device and the liquid crystal panel, etc. every year. For this demand, our company has been developing various stages with basic concept of H-figure stage which has direct drive mechanism by air guide and linear motor. This report introduces mainly the basic technique, the element technology which composes this H-figure stage, and the technology in the surrounding here, and the high-speed Z-mechanism being paid attention now is outlined.
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