ZnShyphen;coated Ag hollow waveguides are newly proposed and fabricated to realize a durable and nontoxic waveguide for CO2laser light transmission. The fabrication method is based on rfhyphen;sputtering and electroplating techniques and a polyimide tube is used as a hollow mandrel. As a result of measurements, lowhyphen;loss property of the ZnShyphen;coated waveguide is shown and the beam profile with a sharp energy peak is obtained. The result of the aging test proves good durability of the ZnShyphen;coated Ag waveguide.
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