An impedance analyzer of semiconductor structures in the infra-low frequency range

摘要

An impedance analyzer of semiconductor structures at infralow frequencies is designed. The analyzer contains a remote measuring head placed near the studied structure and an electronic unit connected to the computer via a USB interface. The analyzer measures the capacitance, conductivity, and current of a structure in a frequency range of 0.01-10 Hz. The measurement ranges of the capacitance value are 10, 100, and 1000 pF, of the current-25, 250, and 2500 pA, and of the conductivity-10, 100, and 1000 pS.