A device for monitoring the distribution of particles of off-electrode high-voltage gas-discharge plasma over the stream cross section using the curved-cavity method

摘要

A device for monitoring the particle distribution over the cross section of a low-temperature offelectrode plasma stream, which is produced by a gas discharge, is proposed. Particles are collected with a stack of metallic tubes, which are bent at an angle of 0 < beta < 90A degrees and are linearly arranged over the plasmastream cross section. The inner (D) and outer (d (2)) diameters of the tubes correspond to the conditions d (1) < D < d (1) + 0.4L, d (2) < d (1) + L, which allow a significant decrease in the fraction of plasma particles reflected from the end surfaces of tubes (d (1) is the diameter of the holes in the plate that form microstreams of charged particles, and L is the distance between these holes). The fulfillment of the above conditions and manufacturing of the ends of the curved tubes in the form of a cone completely eliminate the possibility of ionizing atoms of the residual gas in the volume of the tube cavities. The practical application of the proposed design in measurements of the current density over the cross section of the off-electrode gas-discharge stream showed that the density-distribution uniformity of negatively charged plasma particles was at least 98%.