A computerized control and data handling system of a multifunction electron spectrometer and software for processing complex electron spectra

摘要

The system is designed for analyzing sample surfaces by using high-resolution X-ray photoelectron and Auger electron spectroscopy. It is based on digital generators for voltage scanning with digital control and data acquisition modules and analog-signal input and output modules, which are built into the computer, and provides for recording in the particle counting mode and synchronous detection of analog signals. The software for recording ensures the operation in the modes of spectra recording, spectrometer calibration, and surface imaging and mapping with preliminary processing (background elimination, filtration, smoothing, calculation of derivatives, integration, adding, subtracting, and obtaining convolutions of spectra). The programs for quantitative evaluation of spectrometric information decode complex spectra that contain poorly resolved or superimposed peaks, and solve problems of model approximation of spectra and deconvolution of peaks, i.e., eliminate their broadening due to the instrumental function of the device.