A low-pressure excimer light source for a spectral region of 170-310 nm

摘要

A low-pressure excimer light source pumped by a longitudinal dc glow discharge operates on the B-X and D-X transitions of Ar, Kr, and Xe chlorides and on the D-A transition of chlorine molecules. The output characteristics of a source with a discharge region 100 mm long and an inner diameter of the discharge tube of 5 mm were optimized on Xe(Kr, Ar)/Cl{sub}2, Ar/Kr/Cl{sub}2, Ar/Xe/Cl{sub}2, and Kr/Xe/Cl{sub}2 mixtures. The light source operated within a spectral range of 170 to 310 nm. The average radiation power and operation efficiency were 1.8-8.2 Wand ≤ 21%, respectively.