In line with the rapid growth of internet data traffic, crucial has become the urgent realization of all-transparent optical network. Of various key-components to that end, increasing has been the import of optical switches. Among various types of optical switches, for example mechanical, liquid-crystal, planer-light circuit, and MEMS (Micro Electro Mechanical Systems), MEMS-based approach is thought to be the most fitting for the construction of high-port switch fabric. This time we have developed a MEMS-based mirror-actuator module for the use of the optical switch. In this report will be shown the basic feature of the mirror module as well as some results of actuation tests.
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