Growth of textured diamond films on foreign substrates from attached seed crystals

摘要

A technique has been developed to grow (111) textured diamond films on smooth substrates using attached diamond seeds. The degree of texture is defined by the initial texture of the seeds. This initial texture depends upon the seed size and the cleaning procedure. Under the best conditions, over 90percnt; of the seeds exhibit a (111) texture with a tip angle of less than 0.25deg;. Further growth of diamond on these seeds does not affect the texture, and diamond films obtained by such growth are expected to have smoother surfaces and more controlled doping than nontextured polycrystalline films.