Heteropitaxial YAIO(3) films on (100)SrTiO3 Substrates: The use of pole figures as a non-invasive tool to assess the direction of growth

摘要

YAlO3 films are grown on (100)SrTiO3 substrates through an in-situ novel metal-organic (MO)CVD strategy involving a molten source consisting of the second-generation Y(hfa)(3)center dot diglyme (Hhfa=1,1,1,5,5,5-hexafluoro-2,4-pentanedione, diglyme= bis(2-methoxyethyl)ether) precursor which acts as a solvent for the Al(acac)(3) (Hacac = acetylacetone). The X-ray diffraction (XRD) patterns show that the films are crystalline and highly oriented, while compositional analysis indicates that the films possess the correct 1:1 ratio. Pole figures are applied as a simple, economic, non-invasive tool to assess the growth direction of YAlO3 films.