A rarefied gas flow through a thin orifice is studied, based on the direct simulation Monte Carlo method. Mass flow rates have been calculated over the whole range of the Knudsen number in the case of outflow into vacuum. The diffuse-specular interaction between gas and surface was assumed. It has been found that the dependence of the mass flow rate on the gas-surface interaction law is very weak, A comparison with experimental data available in the open literature has been performed. References: 19
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