Semiconductor industry adopts a range of contamination detection technologies

摘要

Contamination detection today is a technology not only of sight and sound but also of the ion. The latest advances incorporate laser, soundwave, and helium ion-based detection technologies—all now in use in semiconductor manufacturing, as device suppliers seek to spot and eliminate contaminants. An example of the first of the three can be found in the offerings of Tiger Optics (War-rington, PA). The company's latest analyzers measure airborne contaminants that impact the process.