Design Concept of Single-Mode Three Dimensional (Pb, La) (Zr, Ti) O_3 Thin Films Waveguide Structures for Integrated Optics Applications

摘要

The opportunity of using ferroelectric (Pb, La), (Zr,Ti)O_3 thin films has been extensively studied for makingintegrated optic devices since they are expected to have potentialoptical properties. The configurations of the optical waveguideand the metallic electrodes are considered as the basic elements infabrication schemes. Design rules are given in this study for theanalysis of three-dimensional structures using theoretical tools, i.e.,the Effective Index Method and Beam Propagation Method.Definition of the opto-geometrical parameters, i.e., film thickness,rib width and height, coupling length, is essential for enhancingwaveguiding performances. The optimization has been proposedtaking into account the actual advance of the etching technology.Results are reported for planar optical waveguides.