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Planar Electrostatic Micromotors on the Basis of the Ferroelectric Films

机译:基于铁电薄膜的平面静电微电机

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摘要

The principle of the operation of the step petalousmicromotors based on the effect of the electrostatic rolling on theferroelectric surface is considered. These micromotors producedby means of microelectronic technology are distinguished as beingenergy-intensive (more than 1 J/m~2 at 20-40 V vol.tage) and theyprovide precise movement: the step ranges from 10 A to 100#mu#m. The technical and experimental data are givencharacterizing the energetic and mechanical parameters of these micromotors.
机译:考虑了基于铁电表面上的静电滚动效应的步进花瓣状微型电动机的工作原理。这些通过微电子技术生产的微电机具有高能耗(在20-40 V的电压下大于1 J / m〜2)并且可提供精确的运动:步进范围从10 A到100#mu#m。给出了表征这些微电机的能量和机械参数的技术和实验数据。

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