In 1954,in a Journal of Applied Physics article,Charles Smith of Bell Labs noted the first manifestation of Microelectromechanical systems(MEMS)to be the discovery of the piezoresistive effect in Germanium and Silicon.The piezoresistive effect is the electrical phenomenon whereby electric resistance changes in an object with geometrical changes in the structure of that object such as bending,squeezing,and compressing.We are currently at a half-century of MEMS research,design,and development.Why has it taken so long for the MEMS market and technology to realize its potential or reach the expected volumes?
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