Piezoelectric properties of lead zirconate titanate thin films characterized by the pneumatic loading method

摘要

Although there are many studies for thecharacterization of piezoelectric thin film, it is still stronglyneeded to develop the easy and practical way to measure thepiezoelectricity existing in thin film. Piezoelectric properties oflead zirconate titanate (PZT) thin film were investigated by a newpneumatic loading method, which has been devised as a morereliable and convenient characterization technique. We haveobserved the aging phenomena and have examined the effects ofpoling voltage and time on piezoelectric properties of the PZTthin films. There was no built-in piezoelectricity in virgin films.