We report on the first demonstration of traveling wave photodetector fabricated by uni-carrier traveling photodiodes (TW-UTC-PD). They comprise three UTC-PDs with 0.06 μm absorption layer that is periodically arranged along a coplanar waveguide transmission line. The photoresponse of TW-UTC-PD is 3 times larger than that of the single UTC-PD. A 3 dB bandwidth of 115 GHz at 1.55 μm was achieved for a TW-UTC-PD with terminal resistors at input end. This is almost the same value for the single UTC-PD. These results suggest that the TW-UTC-PD is fabricated with both velocity and impedance matchings and that the characteristics of an individual UTC-PD dominate that of TW-UTC-PD with terminal resistors.
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