BILAYER STRUCTURE OF PD-AL2O3 FOR UV VIDICON APPLICATIONS

摘要

A bilayer structure of Pd-Al2O3 was developed as a signal plate for vidicon TV tubes. The 20 Angstrom thick Pd layer served as the conducting plate while the 30-50 Angstrom thick Al2O3 coating functioned as the transparent protecting film. The obtained signal plates had a sheet resistance of 2.5 K Ohm and a transmission coefficient of 71 at a wavelength of 250 nm. The main advantage of vidicons equipped with such signal plates is to have a dark current of less than 0.05 nA, which is suitable for UV applications. The Pd-Al2O3 bilayers were produced by a novel sputtering method. References: 17