The goal of this study is to develop an airflow meter sensor for the detection of vehicle intake system in internal combustion engines. The study uses micro-electromechanical process technology to develop a hot-film flow meter with an alumina substrate and platinum film heater; the hot-line method is used to create a micro-airflow anemometry meter sensor relying on variations in resistance of the platinum film corresponding to different wind velocities at the set temperatures. The alumina plate used in this study is produced by polishing an alumina substrate; a platinum film is then deposited on the plate to complete the micro-heater used in the sensor. Resistance on the sensor side varies as gas flows through the sensor, and the instrument determines airflow velocity on the basis of the changes in resistance caused by gas flow differences. Airflow velocities ranging from 10 to 60 m/s are used to test. Signals of change in resistance display a regular slope, indicating that the relationship between the changes in airflow velocity remains predictable throughout the sensing range. Therefore, the sensor can achieve its purpose of airflow measurement completely.
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