Deep level transient spectroscopy technique has been used to study the thermal dynamics of Au-Fe pairs in silicon during isochronal annealing. The formation and dissociation energies of an Au-Fe pair has been calculated by counting the number of pairs formed during each annealing. The respective energies of the Au-Fe pair are found to be similar to 0.36 eV and similar to 0.46 eV. The pairing of Au- and Fe-i(+) takes place under predominant electrostatic forces.
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