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Device application of nanolithography

机译:Device application of nanolithography

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摘要

Recent progress in electron-beam lithography has reached the 10-nm scale and opened up the way to fabricating nanoscale devices. Nanodevices are attractive because they enable functions that macroscopic devices cannot, including detecting quantum effects, enhancing single electron charging effects, and directly handling atoms or molecules. This article introduces three types of nanodevices that apply these functions: an ultimately small MOSFET, a ten-valued single electron transistor memory, and a nanobiodevice

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