Measuring the refractive index of an inhomogeneous antireflection coating

摘要

Ellipsometric and photometric methods are used to measure the refractive index of it film based on tetraethoxy silane. It is shown that the method of ellipsometry makes it possible not only to determine the refractive index but also to detect the inhomogeneity of the optical profile. (c) 2009 Optical Society of America.