Interference effects on the surface of Nd:YAGhyphen;laserhyphen;reacted Pdhyphen;silicide

摘要

The generation of silicides by laser irradiation of Pdhyphen;coated Si wafers is often associated with circular ripple patterns formed in the irradiated area. These surface modulations are explained by inhomogeneous reaction of Pd with Si due to interference effects in the incident laser beam.