首页> 外文期刊>Journal of optical technology >Noncontact holographic method of measuring linear displacements
【24h】

Noncontact holographic method of measuring linear displacements

机译:测量线性位移的非接触式全息方法

获取原文
获取原文并翻译 | 示例
获取外文期刊封面目录资料

摘要

A noncontact optical method has been developed for measuring the linear displacements of an object to within several angstroms by measuring how the intensity of a light beam coming from a three-dimensional transmissive holographic diffraction grating (a hologram) depends on the phase mismatch between the beams incident on the hologram. The phase mismatch between the beams is caused by the displacement of the object, from which one of the beams incident on the grating is reflected. It is shown that, when a He-Ne laser (λ = 633 nm) and a photodetector whose relative error ΔI/I_(max) is 0.5* 10~(-3) is used, the error in measuring the displacement of the object can be brought to about 0.1 nm.
机译:已经开发了一种非接触式光学方法,用于测量物体在几埃内的线性位移,方法是测量来自三维透射全息衍射光栅(全息图)的光束强度如何取决于入射到全息图上的光束之间的相位不匹配。光束之间的相位不匹配是由物体的位移引起的,从物体的位移反射入射到光栅上的一个光束。结果表明,当使用氦氖激光器(λ = 633 nm)和相对误差ΔI/I_(max)为0.5*10~(-3)的光电探测器时,测量物体位移的误差可达到0.1 nm左右。

著录项

获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号